Air flow controller for heater of substrate processing apparatus



FIG. 1 is a front, bottom and right side perspective view of an air flow ontroller for heater of substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view taken in the direction of line 8-8 in FIG. 2.

The broken lines immediately adjacent to the shaded areas represent the bounds of the claimed design while all other broken lines are directed to environment; the broken lines form no part of the claimed design. 

CLAIM We claim the ornamental design for an air flow controller for heater of substrate processing apparatus, as shown and described. 